@article{anovelvisualfaultdetectionand,
  title = {A Novel Visual Fault Detection and Classification System for Semiconductor Manufacturing Using Stacked Hybrid Convolutional Neural Networks},
  author = {Tobias Schlosser and Frederik Beuth and Michael Friedrich and Danny Kowerko},
  year = {2019},
  eprint = {1911.11250},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/1911.11250v6},
}