@article{aphysicsconstraineddesigndrivenmethodolo,
  title = {A Physics-Constrained, Design-Driven Methodology for Defect Dataset Generation in Optical Lithography},
  author = {Yuehua Hu and Jiyeong Kong and Dong-yeol Shin and Jaekyun Kim and Kyung-Tae Kang},
  year = {2025},
  eprint = {2512.09001},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2512.09001},
}