@article{addressingclassimbalanceanddata,
  title = {Addressing Class Imbalance and Data Limitations in Advanced Node Semiconductor Defect Inspection: A Generative Approach for SEM Images},
  author = {Bappaditya Dey and Vic De Ridder and Victor Blanco and Sandip Halder and Bartel Van Waeyenberge},
  year = {2024},
  eprint = {2407.10348},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2407.10348v1},
}