@article{advanced3dimagingapproachtotsvtgv,
  title = {Advanced 3D Imaging Approach to TSV/TGV Metrology and Inspection Using Only Optical Microscopy},
  author = {Gugeong Sung},
  year = {2025},
  eprint = {2505.04913},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2505.04913v1},
}