@article{agentprocessbenchdiagnosingsteplevelproc, title = {AgentProcessBench: Diagnosing Step-Level Process Quality in Tool-Using Agents}, author = {Shengda Fan and Xuyan Ye and Yupeng Huo and Zhi-Yuan Chen and Yiju Guo and Shenzhi Yang and Wenkai Yang and Shuqi Ye and Jingwen Chen and Haotian Chen and Xin Cong and Yankai Lin}, year = {2026}, eprint = {2603.14465}, archivePrefix = {arXiv}, url = {https://arxiv.org/abs/2603.14465}, }