@article{automatedsemiconductordefectinspectionin,
  title = {Automated Semiconductor Defect Inspection in Scanning Electron Microscope Images: a Systematic Review},
  author = {Thibault Lechien and Enrique Dehaerne and Bappaditya Dey and Victor Blanco and Sandip Halder and Stefan De Gendt and Wannes Meert},
  year = {2023},
  eprint = {2308.08376},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2308.08376v2},
}