@article{benchmarkingfeatureextractorsfor,
  title = {Benchmarking Feature Extractors for Reinforcement Learning-Based Semiconductor Defect Localization},
  author = {Enrique Dehaerne and Bappaditya Dey and Sandip Halder and Stefan De Gendt},
  year = {2023},
  eprint = {2311.11145},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2311.11145v1},
}