@article{capbenchamultipdkdatasetformachinelearni, title = {CapBench: A Multi-PDK Dataset for Machine-Learning-Based Post-Layout Capacitance Extraction}, author = {Hector R. Rodriguez and Jiechen Huang and Wenjian Yu}, year = {2026}, eprint = {2604.11202}, archivePrefix = {arXiv}, url = {https://arxiv.org/abs/2604.11202}, }