@article{continuouswavelettransformandsiamesenetw, title = {Continuous Wavelet Transform and Siamese Network-Based Anomaly Detection in Multi-variate Semiconductor Process Time Series}, author = {Bappaditya Dey and Daniel Sorensen and Minjin Hwang and Sandip Halder}, year = {2025}, eprint = {2507.01999}, archivePrefix = {arXiv}, url = {https://arxiv.org/abs/2507.01999}, }