@article{deeplearningbaseddefectclassificationand,
  title = {Deep Learning based Defect classification and detection in SEM images: A Mask R-CNN approach},
  author = {Bappaditya Dey and Enrique Dehaerne and Kasem Khalil and Sandip Halder and Philippe Leray and Magdy A. Bayoumi},
  year = {2022},
  eprint = {2211.02185},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2211.02185v1},
}