@article{deeplearningbaseddefectclassificationand,
  title = {Deep Learning-Based Defect Classification and Detection in SEM Images},
  author = {Bappaditya Deya and Dipam Goswamif and Sandip Haldera and Kasem Khalilb and Philippe Leraya and Magdy A. Bayoumi},
  year = {2022},
  eprint = {2206.13505},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2206.13505v1},
}