@article{electronmicroscopybasedautomaticdefect,
  title = {Scanning Electron Microscopy-based Automatic Defect Inspection for Semiconductor Manufacturing: A Systematic Review},
  author = {Enrique Dehaerne and Bappaditya Dey and Victor Blanco and Jesse Davis},
  year = {2024},
  eprint = {2409.06833},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2409.06833v2},
}