@article{fastaccuratedefectdetectioninwafer,
  title = {Fast Accurate Defect Detection in Wafer Fabrication},
  author = {Thomas Olschewski},
  year = {2021},
  eprint = {2108.11757},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2108.11757v1},
}