@article{genfabavariationawaregenerativemodelforp, title = {Gen-Fab: A Variation-Aware Generative Model for Predicting Fabrication Variations in Nanophotonic Devices}, author = {Rambod Azimi and Yuri Grinberg and Dan-Xia Xu and Odile Liboiron-Ladouceur}, year = {2026}, eprint = {2603.11505}, archivePrefix = {arXiv}, url = {https://arxiv.org/abs/2603.11505}, }