@article{gpuacceleratedinverselithographytowards,
  title = {GPU-Accelerated Inverse Lithography Towards High Quality Curvy Mask Generation},
  author = {HaoYu Yang and Haoxing Ren},
  year = {2024},
  eprint = {2411.07311},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2411.07311v1},
}