@article{highfidelitysynthetictransmissionelectro,
  title = {High-Fidelity Synthetic Transmission Electron Microscopy Image Generation Using Diffusion Probabilistic Models for Data-Limited Semiconductor Metrology},
  author = {Johannes Boehm and Bappaditya Dey},
  year = {2026},
  eprint = {2606.24817},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2606.24817},
}