@article{ililtimplicitlearningofinverse,
  title = {ILILT: Implicit Learning of Inverse Lithography Technologies},
  author = {HaoYu Yang and Haoxing Ren},
  year = {2024},
  eprint = {2405.03574},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2405.03574v1},
}