@article{improveddefectdetectionandclassification, title = {Improved Defect Detection and Classification Method for Advanced IC Nodes by Using Slicing Aided Hyper Inference with Refinement Strategy}, author = {Vic De Ridder and Bappaditya Dey and Victor Blanco and Sandip Halder and Bartel Van Waeyenberge}, year = {2023}, eprint = {2311.11439}, archivePrefix = {arXiv}, url = {https://arxiv.org/abs/2311.11439v2}, }