@article{improvingfabricationfidelityofintegrated, title = {Improving Fabrication Fidelity of Integrated Nanophotonic Devices Using Deep Learning}, author = {Dusan Gostimirovic and Yuri Grinberg and Dan-Xia Xu and Odile Liboiron-Ladouceur}, year = {2023}, eprint = {2303.12136}, archivePrefix = {arXiv}, url = {https://arxiv.org/abs/2303.12136v1}, }