@article{inverselithographyphysicsinformeddeep,
  title = {Inverse Lithography Physics-informed Deep Neural Level Set for Mask Optimization},
  author = {Xing-Yu Ma and Shaogang Hao},
  year = {2023},
  eprint = {2308.12299},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2308.12299v1},
}