@article{keepingdeeplithographysimulatorsupdated,
  title = {Keeping Deep Lithography Simulators Updated: Global-Local Shape-Based Novelty Detection and Active Learning},
  author = {Hao-Chiang Shao and Hsing-Lei Ping and Kuo-shiuan Chen and Weng-Tai Su and Chia-Wen Lin and Shao-Yun Fang and Pin-Yian Tsai and Yan-Hsiu Liu},
  year = {2022},
  eprint = {2201.09717},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2201.09717v1},
}