@article{largescalemaskoptimizationvia,
  title = {Large Scale Mask Optimization Via Convolutional Fourier Neural Operator and Litho-Guided Self Training},
  author = {HaoYu Yang and Zongyi Li and Kumara Sastry and Saumyadip Mukhopadhyay and Anima Anandkumar and Brucek Khailany and Vivek Singh and Haoxing Ren},
  year = {2022},
  eprint = {2207.04056},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2207.04056v1},
}