@article{learningbasedfeedforwardaugmentationfor, title = {Learning-based feedforward augmentation for steady state rejection of residual dynamics on a nanometer-accurate planar actuator system}, author = {Ioannis Proimadis and Yorick Broens and Roland Tóth and Hans Butler}, year = {2021}, eprint = {2105.01458}, archivePrefix = {arXiv}, url = {https://arxiv.org/abs/2105.01458v1}, }