@article{learningtooptimizecapacityplanninginsemi, title = {Learning to Optimize Capacity Planning in Semiconductor Manufacturing}, author = {Philipp Andelfinger and Jieyi Bi and Qiuyu Zhu and Jianan Zhou and Bo Zhang and Fei Fei Zhang and Chew Wye Chan and Boon Ping Gan and Wentong Cai and Jie Zhang}, year = {2025}, eprint = {2509.15767}, archivePrefix = {arXiv}, url = {https://arxiv.org/abs/2509.15767}, }