@article{lithodreameraphysicsinformedworldmodelfo,
  title = {LithoDreamer: A Physics-Informed World Model for Multi-Stage Computational Lithography},
  author = {Yuqi Jiang and Yumeng Liu and Zimu Li and Jinyuan Deng and Qian Jin and Yucheng Cui and Yu Li and Xunzhao Yin and Qi Sun and Cheng Zhuo},
  year = {2026},
  eprint = {2606.26713},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2606.26713},
}