@article{lithographyhotspotdetectionvia,
  title = {Lithography Hotspot Detection via Heterogeneous Federated Learning with Local Adaptation},
  author = {Xuezhong Lin and Jingyu Pan and Jinming Xu and Yiran Chen and Cheng Zhuo},
  year = {2021},
  eprint = {2107.04367},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2107.04367v3},
}