@article{localrationalmodelingforidentification,
  title = {Local Rational Modeling for Identification Beyond the Nyquist Frequency: Applied to a Prototype Wafer Stage},
  author = {Max van Haren and Lennart Blanken and Koen Classens and Tom Oomen},
  year = {2025},
  eprint = {2503.01344},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2503.01344v1},
}