@article{machinelearningandatomiclayerdeposition,
  title = {Machine learning and atomic layer deposition: predicting saturation times from reactor growth profiles using artificial neural networks},
  author = {Angel Yanguas-Gil and Jeffrey W. Elam},
  year = {2022},
  eprint = {2205.08378},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2205.08378v1},
}