@article{machinelearningbasedcvdvirtualmetrology,
  title = {Machine Learning based CVD Virtual Metrology in Mass Produced Semiconductor Process},
  author = {Yunsong Xie and Ryan Stearrett},
  year = {2021},
  eprint = {2107.05071},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2107.05071v2},
}