@article{metalinterlayerviakeepoutzoneinm3dic,
  title = {Metal Inter-layer Via Keep-out-zone in M3D IC: A Critical Process-aware Design Consideration},
  author = {Madhava Sarma Vemuri and Umamaheswara Rao Tida},
  year = {2023},
  eprint = {2304.13808},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2304.13808v1},
}