@article{paltophysicsinformedactivelearningfortri, title = {PALTO: Physics-Informed Active Learning for Tri-Gate FinFET Design Optimization for Vertical Power Delivery}, author = {Ayoub Sadeghi and Leonid Popryho and Inna Partin-Vaisband}, year = {2026}, eprint = {2606.01265}, archivePrefix = {arXiv}, url = {https://arxiv.org/abs/2606.01265}, }