@article{physicsinformedneuralnetworksforsemicond,
  title = {Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review},
  author = {Tao Han and Zahra Taheri and Hyunwoong Ko},
  year = {2025},
  eprint = {2507.10983},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2507.10983},
}