@article{proactivestatisticalprocesscontrolusinga, title = {Proactive Statistical Process Control Using AI: A Time Series Forecasting Approach for Semiconductor Manufacturing}, author = {Mohammad Iqbal Rasul Seeam}, year = {2025}, eprint = {2509.16431}, archivePrefix = {arXiv}, url = {https://arxiv.org/abs/2509.16431}, }