@article{quantummachinelearningforsemiconductor,
  title = {Quantum Kernel Learning for Small Dataset Modeling in Semiconductor Fabrication: Application to Ohmic Contact},
  author = {Zeheng Wang and Fangzhou Wang and Liang Li and ZiRui Wang and Timothy van der Laan and Ross C. C. Leon and Jing-Kai Huang and Muhammad Usman},
  year = {2024},
  eprint = {2409.10803},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2409.10803v3},
}