@article{scalablemultiplepatterninglayout,
  title = {Scalable Multiple Patterning Layout Decomposition Implemented by a Distribution Evolutionary Algorithm},
  author = {Yu Chen and Yongjian Xu and Ning Xu},
  year = {2023},
  eprint = {2304.04207},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2304.04207v1},
}