@article{semclipprecisefewshotlearningfor,
  title = {SEM-CLIP: Precise Few-Shot Learning for Nanoscale Defect Detection in Scanning Electron Microscope Image},
  author = {Qian Jin and Yuqi Jiang and Xudong Lu and Yumeng Liu and Yining Chen and Dawei Gao and Qi Sun and Cheng Zhuo},
  year = {2025},
  eprint = {2502.14884},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2502.14884v1},
}