@article{semiconductordefectpatternclassification,
  title = {Semiconductor Defect Pattern Classification by Self-Proliferation-and-Attention Neural Network},
  author = {YuanFu Yang and Min Sun},
  year = {2022},
  eprint = {2212.00345},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2212.00345v1},
}