@article{surrogatemodelstooptimizeplasmaassisted,
  title = {Surrogate models to optimize plasma assisted atomic layer deposition in high aspect ratio features},
  author = {Angel Yanguas-Gil and Jeffrey W. Elam},
  year = {2025},
  eprint = {2506.09313},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2506.09313v1},
}