@article{torchresistopensourcedifferentiableresis,
  title = {TorchResist: Open-Source Differentiable Resist Simulator},
  author = {Zixiao Wang and Jieya Zhou and Su Zheng and Shuo Yin and Kaichao Liang and Shoubo Hu and Xiao Chen and Bei Yu},
  year = {2025},
  eprint = {2502.06838},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2502.06838v1},
}