@article{towardsimprovedsemiconductordefect,
  title = {Towards Improved Semiconductor Defect Inspection for high-NA EUVL based on SEMI-SuperYOLO-NAS},
  author = {Ying-Lin Chen and Jacob Deforce and Vic De Ridder and Bappaditya Dey and Victor Blanco and Sandip Halder and Philippe Leray},
  year = {2024},
  eprint = {2404.05862},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2404.05862v1},
}