@article{universaldeoxidationofsemiconductor,
  title = {Universal Deoxidation of Semiconductor Substrates Assisted by Machine-Learning and Real-Time-Feedback-Control},
  author = {Chao Shen and Wenkang Zhan and Jian Tang and Zhaofeng Wu and Bo Xu and Chao Zhao and Zhanguo Wang},
  year = {2023},
  eprint = {2312.01662},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2312.01662v1},
}