@article{unsupervisedselfdrivingmultistepgrowth,
  title = {SemiEpi: Self-driving, Closed-loop Multi-Step Growth of Semiconductor Heterostructures Guided by Machine Learning},
  author = {Chao Shen and Wenkang Zhan and Kaiyao Xin and Shujie Pan and Xiaotian Cheng and Ruixiang Liu and Zhe Feng and Chaoyuan Jin and Hui Cong and Chi Xu and Bo Xu and Tien Khee Ng and Siming Chen and Chunlai Xue and Zhanguo Wang and Chao Zhao},
  year = {2024},
  eprint = {2408.03508},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2408.03508v3},
}