@article{wavelengthmultiplexedmultimodeeuv, title = {Wavelength-multiplexed Multi-mode EUV Reflection Ptychography based on Automatic-Differentiation}, author = {Yifeng Shao and Sven Weerdenburg and Jacob Seifert and H. Paul Urbach and Allard P. Mosk and Wim Coene}, year = {2023}, eprint = {2311.14780}, archivePrefix = {arXiv}, url = {https://arxiv.org/abs/2311.14780v1}, }