TorchResist: Open-Source Differentiable Resist Simulator
Recent decades have witnessed remarkable advancements in artificial intelligence (AI), including large language models (LLMs), image and video generative models, and embodied AI systems. These advancements have led to an explosive increase in the demand for computational power, challenging the limits of Moore's Law. Optical lithography, a critical technology in semiconductor manufacturing, faces significant challenges due to its high costs. To address this, various lithography simulators have been developed. However, many of these simulators are limited by their inadequate photoresist modeling capabilities. This paper presents TorchResist, an open-source, differentiable photoresist simulator.TorchResist employs an analytical approach to model the photoresist process, functioning as a white-box system with at most twenty interpretable parameters. Leveraging modern differentiable programming techniques and parallel computing on GPUs, TorchResist enables seamless co-optimization with other tools across multiple related tasks. Our experimental results demonstrate that TorchResist achieves superior accuracy and efficiency compared to existing solutions. The source code is publicly available.
Code (1)
Similar Papers 제목 키워드 기반
j-Wave: An open-source differentiable wave simulator
We present an open-source differentiable acoustic simulator, j-Wave, which can solve time-varying and time-harmonic acoustic problems. It supports automatic differentiation, which is a program transformation technique th…
BIG-bench Machine LearningDifferentiable Physics Simulations with Contacts: Do They Have Correct Gradients w.r.t. Position, Velocity and Control?
In recent years, an increasing amount of work has focused on differentiable physics simulation and has produced a set of open source projects such as Tiny Differentiable Simulator, Nimble Physics, diffTaichi, Brax, Warp,…
PositionCorrigibility with Utility Preservation
Corrigibility is a safety property for artificially intelligent agents. A corrigible agent will not resist attempts by authorized parties to alter the goals and constraints that were encoded in the agent when it was firs…
Deluca -- A Differentiable Control Library: Environments, Methods, and Benchmarking
We present an open-source library of natively differentiable physics and robotics environments, accompanied by gradient-based control methods and a benchmark-ing suite. The introduced environments allow auto-differentiat…
BenchmarkingOpenAI GymGradient-based Trajectory Optimization with Parallelized Differentiable Traffic Simulation
We present a parallelized differentiable traffic simulator based on the Intelligent Driver Model (IDM), a car-following framework that incorporates driver behavior as key variables. Our vehicle simulator efficiently mode…
Trajectory Prediction